3rd MIGRATE Workshop & Summer School
24-29 Jun 2018 FURIANI (France)
CHARACTERIZATION OF A SAW CHIP AND WIRELESS APPLICATION OF THE PIRANI PRINCIPLE IN VACUUM
Sofia Toto  1, @  , Juergen Brandner  2, @  , Gian Luca Morini  3, @  , Jan Korvink, Achim Voigt, Martin Wüest  4, @  
1 : Institue of Microstructure Technology  (KIT-IMT)  -  Website
Hermann von Helmholtz Platz 1 76344 Eggenstein Leopoldshafen -  Germany
2 : Karlsruhe Institute of Technology  (KIT)  -  Website
Campus North, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein-Leopoldshafen Bd. 605 / R 314 Campus South, Bd. 30.41 / R 131 -  Germany
3 : DIN-Alma Mater Studiorum Università di Bologna
Via Zamboni, 33 40126 Bologna -  Italy
4 : INFICON AG
INFICON AG, Alte Landstrasse 6, 9496 Balzers, Liechtenstein -  Liechtenstein
Subject : : oral
Topics : Sensors and measurements techniques
PDF version :  PDF version
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